With the miniaturization of products to the levels of
micrometers and the recent developments in
microsystem fabrication technologies, there arises a
great need for an assembly process for the formation
of complex hybrid microsystems. Integration of
microcomponents, manufactured from different
materials using different micro fabrication
techniques, is still a primary challenge since some
of the fundamental problems originating from the
small size of parts to be manipulated, high precision
necessity and the physics of the micro world are
still not fully investigated. In this book, design
and development of an open-architecture and modular
microassembly workstation for efficient and reliable
assembly of micromachined parts is presented through
detailed inspection of the necessities for design and
problems which arise as a result of the nature of the
microworld. The analysis of the design process will
be useful for the investigation of the inevitable
technology of near future, microassembly, with the
increasing trend towards miniaturization in every
aspect of our lives and will be especially helpful to
professionals in Microsystems Technologies.